暂无分享,去创建一个
Y. Chun | J. Kim | J. Jeon
[1] Kim Ki-Hyun,et al. The concept design of the x y θ fine stage and its optimal design to obtain fast response in lithography system. , 2001 .
[2] Seung-Kyu Park,et al. A Study on the Optimal Model Following Sliding Mode Control , 2001 .