论文信息 - The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films. - 字舞流文

The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films.

A. Sherchenkov | M. Smayev | P. Lazarenko | S. Kozyukhin | T. Kulevoy | D. Seleznev | A. Sitnikov | A. Kozlov | A. Yakubov | Y. Vorobyov