LCD검사 장비용 Pad형 Air-bearing Guideway 설계에 관한 연구

LCD inspection system can be classified into Macro, Micro, Macro-Micro composition types Macro type is able to inspect precisely but it is spent on lots of time because of limited part Macro-Micro type is expensive Recently used LCD inspection system is composed with inlet, inspector, outlet LCD is Inspected on floating air pad which is shooting air by CCD. But it is fluctuated by air pressure, noise so it makes trouble which out of CCD Inspection visual field So we study on pad design of air bearing for LCD inspection to minimize fluctuation