论文信息 - Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources - 字舞流文

Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources

Josephine B. Chang | M. Engel | E. Joseph | D. Farmer | S. Engelmann | H. Miyazoe | Shu-jen Han | D. Neumayer | E. Lock | S. Hernández | S. Walton | A. Jagtiani | D. Boris | Shu-Jen Han