Stage error calibration for coordinates measuring machines based on self-calibration algorithm
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Daodang Wang | Jun Zhao | Baowu Zhang | Baohua Zhu | Ming Kong | Xixi Chen | Xu Yangbo | Tiantai Guo
[1] Ming Zhang,et al. A novel on-axis self-calibration approach for precision rotary metrology stages , 2013, 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.
[2] Heber Ferreira Franco de Castro,et al. Uncertainty analysis of a laser calibration system for evaluating the positioning accuracy of a numerically controlled axis of coordinate measuring machines and machine tools , 2008 .
[3] Lars Mattsson,et al. A new general approach for solving the self-calibration problem on large area 2D ultra-precision coordinate measurement machines , 2014 .
[4] Lars Mattsson,et al. Z-correction, a method for achieving ultraprecise self-calibration on large area coordinate measurement machines for photomasks , 2014 .
[5] Jun Ye,et al. Self-calibration in two dimensions: the experiment , 1996, Advanced Lithography.
[6] Guoqing Ding,et al. Self-calibration method of two-dimensional grid plate , 2011, International Symposium on Precision Engineering Measurement and Instrumentation.
[7] Seung-Woo Kim,et al. Self-calibration algorithm for testing out-of-plane errors of two-dimensional profiling stages , 2004 .
[8] Miyu Ozaki,et al. Uncertainty of calibration of 2D planar Coordinate Measuring Machine , 2012 .
[9] Quoc Cuong Dang,et al. Complete 3-D self-calibration of coordinate measuring machines = 자가 보정을 이용한 3차원 측정기의 계통오차 계산 , 2006 .
[10] Gaoliang Dai,et al. Self-calibration of scanning probe microscope: mapping the errors of the instrument , 2008 .
[11] Ming Zhang,et al. A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error , 2013, IEEE Transactions on Instrumentation and Measurement.
[12] Guoxiong Zhang,et al. Error compensation of cylindrical coordinate measuring machines , 2010 .
[13] Shimon Y. Nof,et al. Error Detection and Prediction Algorithms: Application in Robotics , 2007, J. Intell. Robotic Syst..
[15] M. Burdekin,et al. Evaluation of the measurement uncertainty of a positional error calibrator based on a laser interferometer , 2005 .
[16] M. Raugh. Absolute two-dimensional sub-micron metrology for electron beam lithography: A calibration theory with applications☆ , 1985 .
[17] Ming Zhang,et al. A Holistic Self-Calibration Algorithm for $xy$ Precision Metrology Systems , 2012, IEEE Transactions on Instrumentation and Measurement.
[18] Michael R. Raugh. Two-dimensional stage self-calibration: Role of symmetry and invariant sets of points , 1997 .
[19] C. N. Berglund,et al. An exact algorithm for self-calibration of two-dimensional precision metrology stages , 1997 .
[20] John M. Whittey,et al. Stage Cartesian self-calibration: a second method , 1998, Photomask Technology.
[21] Robert J. Hocken,et al. Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’ , 1996 .
[22] Jinchun Hu,et al. Accuracy- and Simplicity-Oriented Self-Calibration Approach for Two-Dimensional Precision Stages , 2013, IEEE Transactions on Industrial Electronics.
[23] Kiyoshi Takamasu,et al. Profile measurement of a wide-area resist surface using a multi-ball cantilever system , 2009 .