Multiaxis interferometric displacement measurement for local probe microscopy

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

[1]  Petr Klapetek,et al.  Local probe microscopy with interferometric monitoring of the stage nanopositioning , 2009 .

[2]  Brian J. Eves,et al.  Design of a large measurement-volume metrological atomic force microscope (AFM) , 2009 .

[3]  R. Lathe.  Phd by thesis , 1988, Nature.

[4]  G. Dai,et al.  A metrological large range atomic force microscope with improved performance. , 2009, The Review of scientific instruments.

[5]  Eberhard Manske,et al.  Neue Anwendungen der Nanomessmaschine (NPM-Maschine) durch die Entwicklung nanoskaliger optischer und taktiler Tastsensoren (New Applications of the Nanomeasuring Machine (NPM-Machine) by Novel Optical and Tactile Probes with Subnanometer Repeatability) , 2006 .

[6]  F. Petru,et al.  Single-frequency HeNe laser with a central maximum of output power , 1993 .

[7]  T. Quinn,et al.  INTERNATIONAL REPORTS: Mise en Pratique of the Definition of the Metre (1992) , 1994 .

[8]  J. Martyn,et al.  Précis , 2010 .

[9]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[10]  B. Edĺen.  The Refractive Index of Air , 1966 .

[11]  Ondřej Číp,et al.  Problems regarding linearity of data of a laser interferometer with a single-frequency laser , 1999 .

[12]  G. B. nsch,et al.  Measurement of the refractive index of air and comparison with modified Edl?n's formulae , 1998 .

[13]  A Lassila,et al.  Calibration of a commercial AFM: traceability for a coordinate system , 2007 .

[14]  Antti Lassila,et al.  Design and characterization of MIKES metrological atomic force microscope , 2010 .

[15]  H Han Haitjema,et al.  Design and calibration of a parallel-moving displacement generator for nano-metrology , 1998 .

[16]  M Maarten Steinbuch,et al.  Design of a long stroke translation stage for AFM , 2010 .

[17]  Masato Aketagawa,et al.  Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10−9 , 2009 .

[18]  Phj Piet Schellekens,et al.  An elastically guided machine axis with nanometer repeatability , 2005 .

[19]  Gaoliang Dai,et al.  Rastersondenmetrologie: Vom metrologischen Rasterkraftmikroskop zum Mikro- und NanokoordinatenmessgerätScanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM , 2009 .

[20]  R. Leach,et al.  The European nanometrology landscape , 2011, Nanotechnology.

[21]  Tino Hausotte,et al.  Nanomeasuring and nanopositioning engineering , 2010 .

[22]  Phj Piet Schellekens,et al.  Design of a High-Precision 3D-Coordinate Measuring Machine , 1998 .

[23]  Josef Lazar,et al.  Absolute frequency shifts of iodine cells for laser stabilization , 2009 .

[24]  Ondrej Cip,et al.  A scale-linearization method for precise laser interferometry , 2000 .

[25]  J Haycocks,et al.  Traceable calibration of transfer standards for scanning probe microscopy , 2005 .

[26]  Jon T. Hougen,et al.  Atlas of the I2 Spectrum from 19 000 to 18 000 cm−1 , 1977, Journal of Research of the National Bureau of Standards. Section A, Physics and Chemistry.

[27]  Remo Guidieri.  Res , 1995, RES: Anthropology and Aesthetics.

[28]  Hans-Ulrich Danzebrink,et al.  Neuere Entwicklungen von Normalen für die 3D-Mikro- und Nanometrologie , 2011 .

[29]  Harald Bosse,et al.  A method for the in situ determination of Abbe errors and their correction , 2007 .