Error Identification for 3-Axis Machine Tool Based on Laser Interferometer

The worldwide competition calls for higher precision machine tool, so how to improve the machining precision is a hot topic. Error identification, as the first basic step of enhancing precision ,is paid expecially attention to. In this paper, two different but important kinds of identification methods—direct identification and indirect identification are introduced, what special is that these methods are achieved just by one equipment—laser interferometer named laser Doppler displacement measurement(LDDM).Through experiments, we can gain the errors of 3-axis machine tool including 3 displacement errors, 6 straightness errors,3 squareness errors, axis spike, backlash, circularity value, cyclic error and so on. The results will benefit for later accuracy improvement.