III-nitride micro-emitter arrays: development and applications

III-nitride micro-emitter array technology was developed in the authors' laboratory around 1999. Since its inception, much progress has been made by several groups and the technology has led to the invention of several novel devices. This paper provides an overview on recent progress in single-chip ac-micro-size light emitting diodes (μLEDs) that can be plugged directly into standard high ac voltage power outlets, self-emissive microdisplays and interconnected μLEDs for boosting light emitting diodes's wall-plug efficiency, all of which were evolved from III-nitride micro-emitter array technology. Finally, potential applications of III-nitride visible micro-emitter arrays as a light source for DNA microarrays and future prospects of III-nitride deep ultraviolet micro-emitter arrays for label-free protein analysis in microarray format by taking advantage of the direct excitation of intrinsic protein fluorescence are discussed.

[1]  Hongxing Jiang,et al.  Size dependence of III-nitride microdisk light-emitting diode characteristics , 2001 .

[2]  D. Birch,et al.  Excitation of fluorescence decay using a 265 nm pulsed light-emitting diode: Evidence for aqueous phenylalanine rotamers , 2006 .

[3]  Hongxing Jiang,et al.  Growth of III-nitride photonic structures on large area silicon substrates , 2006 .

[4]  Z. Ren,et al.  UV LED arrays at 280 and 340 nm for spectroscopic biosensing , 2007 .

[5]  Hongxing Jiang,et al.  OPTICAL RESONANCE MODES IN GAN PYRAMID MICROCAVITIES , 1999 .

[6]  Jing Li,et al.  InGaN/GaN quantum well interconnected microdisk light emitting diodes , 2000 .

[7]  Martin D. Dawson,et al.  Mechanism of enhanced light output efficiency in InGaN-based microlight emitting diodes , 2003 .

[8]  M. Dawson,et al.  High-resolution 128 x 96 nitride microdisplay , 2004, IEEE Electron Device Letters.

[9]  Grigory Simin,et al.  High-power deep ultraviolet light-emitting diodes basedon a micro-pixel design , 2004 .

[10]  M. Asif Khan,et al.  Micro-pixel Design Milliwatt Power 254 nm Emission Light Emitting Diodes , 2004 .

[11]  Hongxing Jiang,et al.  Optical resonance modes in InGaN/GaN multiple-quantum-well microring cavities , 1999 .

[12]  J. Zolper,et al.  Etching processes for fabrication of GaN/InGaN/AlN microdisk laser structures , 1996 .

[13]  B. Haab Methods and applications of antibody microarrays in cancer research , 2003, Proteomics.

[14]  N. Nepal,et al.  Electrical and optical properties of Mg doped Al$_{0.7}$Ga$_{0.3}$N Alloys , 2005 .

[15]  Hongxing Jiang,et al.  Optical properties of GaN pyramids , 1999 .

[16]  J. Lakowicz Principles of fluorescence spectroscopy , 1983 .

[17]  K. B. Nam,et al.  Unique optical properties of AlGaN alloys and related ultraviolet emitters , 2004 .

[18]  Mark A. Reed,et al.  Label-free immunodetection with CMOS-compatible semiconducting nanowires , 2007, Nature.

[19]  T. S. Tan,et al.  High-power truncated-inverted-pyramid (AlxGa1−x)0.5In0.5P/GaP light-emitting diodes exhibiting >50% external quantum efficiency , 1999 .

[20]  Jing Li,et al.  III-nitride blue microdisplays , 2001 .

[21]  Hadis Morkoç,et al.  Optical properties of GaN/AlGaN multiple quantum well microdisks , 1997 .

[22]  Hoi Wai Choi,et al.  InGaN light-emitting diodes of micro-ring geometry , 2003 .

[23]  Demonstration of an InGaN-based light-emitting diode on an AlN/sapphire template by metalorganic chemical vapor deposition , 2002 .

[24]  E. Gu,et al.  High-density matrix-addressable AlInGaN-based 368-nm microarray light-emitting diodes , 2004, IEEE Photonics Technology Letters.

[25]  Richard K. Chang,et al.  Stimulated emission and lasing in whispering-gallery modes of GaN microdisk cavities , 1999 .

[26]  Zhaoyang Fan,et al.  Nitride deep-ultraviolet light-emitting diodes with microlens array , 2005 .

[27]  J. Krasinski,et al.  LASER ACTION IN GAN PYRAMIDS GROWN ON (111) SILICON BY SELECTIVE LATERAL OVERGROWTH , 1998 .

[28]  M. Dawson,et al.  Fabrication of matrix-addressable InGaN-based microdisplays of high array density , 2003, IEEE Photonics Technology Letters.

[29]  UV LED arrays for spectroscopic fingerprinting of airborne biological particles , 2005 .

[30]  Thomas Joos,et al.  Protein microarray technology , 2004, Expert review of proteomics.

[31]  M. Cooper Label-free screening of bio-molecular interactions , 2003, Analytical and bioanalytical chemistry.

[32]  K. H. Kim,et al.  III-nitride blue and ultraviolet photonic crystal light emitting diodes , 2004 .

[33]  Xiuling Li,et al.  Spatially resolved band-edge emission from partially coalesced GaN pyramids prepared by epitaxial lateral overgrowth , 2000 .

[34]  Larry Arbuthnot,et al.  First-generation VGA electroluminescent display for head-mounted applications , 1996, Defense + Commercial Sensing.

[35]  Takahiro Fusayasu,et al.  Development of a Microdisplay Based on the Field Emission Display Technology , 2005, EUC.

[36]  S. P. Rogers,et al.  Two-dimensional LED arrays for virtual display image sources , 1999 .

[37]  David J. S. Birch,et al.  RAPID COMMUNICATION: A new sub-nanosecond LED at 280 nm: application to protein fluorescence , 2004 .

[38]  Hongxing Jiang,et al.  GaN microdisk light emitting diodes , 2000 .

[39]  A. Scherer,et al.  30% external quantum efficiency from surface textured, thin‐film light‐emitting diodes , 1993 .

[40]  S. Ando,et al.  GaN hexagonal microprisms with smooth vertical facets fabricated by selective metalorganic vapor phase epitaxy , 1997 .

[41]  M. Asif Khan,et al.  III–Nitride UV Devices , 2005 .

[42]  Arto V. Nurmikko,et al.  A Matrix Addressable 1024 Element Blue Light Emitting InGaN QW Diode Array , 2001 .

[43]  K. H. Kim,et al.  III-nitride ultraviolet light-emitting diodes with delta doping , 2003 .

[44]  D. Birch,et al.  Selective excitation of tryptophan fluorescence decay in proteins using a sub-nanosecond 295 nm light-emitting diode and time-correlated single-photon counting , 2005 .

[45]  Mim Lal Nakarmi,et al.  Electrical and optical properties of Mg-doped Al0.7Ga0.3N alloys , 2005 .

[46]  Tapered sidewall dry etching process for GaN and its applications in device fabrication , 2005 .

[47]  M. T. Flanagan Fluorescence spectroscopy , 1976, Nature.

[48]  Li Yan,et al.  Matrix Addressable Micro-Pixel 280 nm Deep UV Light-Emitting Diodes , 2006 .

[49]  K. C. Zeng,et al.  Optical modes within III-nitride multiple quantum well microdisk cavities , 1998 .