Integrated concave grating WDM demultiplexer with 0.144 nm channel spacing

A 60-channel WDM demultiplexer based on a concave grating with 0.144 nm channel spacing in the 1.5 /spl mu/m wavelength region was fabricated. The demultiplexer comprises SiO/sub 2//SiON/SiO/sub 2/ waveguides on Si and an individual channel has a full width at half maximum spectral width of 0.09 nm.