The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method

This work is devoted to the CVD-synthesis of arrays of carbon nanotubes (CNTs) on Co-Zr-N-(O), Ni-Nb-N-(O), Co- Ta-N-(O) catalytic alloy films from gas mixture of C2H2+NH3+Ar at a substrate temperature of about 550°C.Heating of the amorphous alloy causes its crystallization and squeezing of the catalytic metal onto the surface. As a result, small catalyst particles are formed on the surface. The CNT growth takes place after wards on these particles. It should be noted that the growth of CNT arrays on these alloys is insensitive to the thickness of alloy film, which makes this approach technically attractive. In particular, the possibility of local CNT growth at the ends of the Co-Ta-N-(O) film and three-level CNT growth at the end of more complex structure SiO2/Ni-Nb-N-O/SiO2/Ni-Nb-N-O/SiO2/Ni-Nb-N-O/SiO2 is demonstrated.

[1]  A. Pavlov,et al.  Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition , 2016 .

[2]  Zhongfan Liu,et al.  Growth of high-density horizontally aligned SWNT arrays using Trojan catalysts , 2015, Nature Communications.

[3]  A. Pavlov,et al.  Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes , 2016 .

[4]  V. Galperin,et al.  Specific features of the structure and properties of carbon nanocolumns formed by low-temperature chemical vapor deposition , 2013 .

[5]  W. Choi,et al.  Ultra-high current density carbon nanotube field emitter structure on three-dimensional micro-channeled copper , 2012 .

[6]  A. Pavlov,et al.  Catalytic CVD-growth of array of multiwall carbon nanotubes on initially amorphous film Co–Zr–N–O , 2016 .

[7]  A. Lobo,et al.  Influence of diameter in the Raman spectra of aligned multi-walled carbon nanotubes , 2007 .

[8]  Dmitry G. Gromov,et al.  Formation of gold and silver cluster arrays using vacuum-thermal evaporation on a non-heated substrate , 2014, Other Conferences.

[9]  S. Hirsch.  Carbon Nanotubes Synthesis Structure Properties And Applications , 2016 .

[10]  Egor V. Lobiak,et al.  Ni–Mo and Co–Mo alloy nanoparticles for catalytic chemical vapor deposition synthesis of carbon nanotubes , 2015 .

[11]  A. Pavlov,et al.  Growth of vertically aligned multiwalled carbon nanotubes forests on metal alloy Ni-Nb-N with low content of catalyst , 2016 .

[12]  E. N. Redichev,et al.  Non-monotonic dependence of temperature of Au nanometer films dissociation into droplets on their thickness on Al2O3 surface , 2010 .

[13]  K. Vasilev,et al.  The effect of gold on modern bimetallic Au–Cu/MWCNT catalysts for the oxy-steam reforming of methanol , 2016 .

[14]  Daniel E. Resasco,et al.  Controlled production of single-wall carbon nanotubes by catalytic decomposition of CO on bimetallic Co–Mo catalysts , 2000 .

[15]  J. Derakhshandeh,et al.  Growth of High-Density Self-Aligned Carbon Nanotubes and Nanofibers Using Palladium Catalyst , 2010 .

[16]  S. Tse,et al.  Non-commercial Research and Educational Use including without Limitation Use in Instruction at Your Institution, Sending It to Specific Colleagues That You Know, and Providing a Copy to Your Institution's Administrator. All Other Uses, Reproduction and Distribution, including without Limitation Comm , 2022 .