분리판형 필터와 저압손형 필터로 부터의 유동특성 비교실험

The air flow characteristics of clean spaces with different types of filters were investigated experimentally. The types of filters are the seperator type and the low pressure drop type. The reference clean space was equipped only with seperator type filters. However. the modified clean space was equipped with both types of filters. In each clean space, the air velocity were measured by the 3-D ultra sonic anemometer. The uniformity and steadiness of main velocity slightly were declined in case of the modified clean space in comparison with the reference clean space. But the decline would not affect seriously in the sense of the commercial specification of clean room.