The role of debris‐induced cantilever effects in cyclic fatigue of micron‐scale silicon films
暂无分享,去创建一个
[1] T. Tanaka,et al. On the mechanism of fatigue crack growth in silicon nitride , 1991 .
[2] S. Horibe,et al. Cyclic fatigue of ceramic materials : influence of crack path and fatigue mechanisms , 1991 .
[3] R. Ballarini,et al. Fatigue Failure in Polysilicon Not Due to Simple Stress Corrosion Cracking , 2002, Science.
[4] Eric A. Stach,et al. A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading , 2002 .
[5] Robert O. Ritchie,et al. High-cycle Fatigue and Durability of Polycrystalline Silicon Thin ®lms in Ambient Air , 2022 .
[6] Steven T. Patton,et al. Failure mechanisms of a MEMS actuator in very high vacuum , 2002 .
[7] Pranav Shrotriya,et al. On the evolution of surface morphology of polysilicon MEMS structures during fatigue , 2004 .
[8] O. Pierron,et al. The critical role of environment in fatigue damage accumulation in deep-reactive ion-etched single-crystal silicon structural films , 2006, Journal of Microelectromechanical Systems.
[9] Eric A. Stach,et al. Fatigue failure in thin-film polycrystalline silicon is due to subcritical cracking within the oxide layer , 2005 .
[10] S. Suresh,et al. Room temperature fatigue crack growth in cemented carbides , 1986 .
[11] T. Kenny,et al. Fatigue crack growth in micro-machined single-crystal silicon , 2004 .
[12] Subra Suresh,et al. Constitutive behavior of a microcracking brittle solid in cyclic compression , 1987 .
[13] William N. Sharpe,et al. Fatigue of polycrystalline silicon under long-term cyclic loading , 2003 .
[14] T. Tanaka,et al. The wedge mechanism of fatigue crack growth in silicon nitride , 1991 .
[15] R. Aigner,et al. Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS] , 2000 .
[16] L. Ewart,et al. Crack propagation in ceramics under cyclic loads , 1987 .
[17] R. Dauskardt,et al. Subcritical Crack‐Growth Behavior of Borosilicate Glass under Cyclic Loads: Evidence of a Mechanical Fatigue Effect , 1997 .
[18] R. Ritchie,et al. High-cycle fatigue of single-crystal silicon thin films , 2001 .
[19] T. Fett. A cantilever effect for cracks with mismatching crack faces? , 1996 .
[20] P. C. Paris,et al. The Stress Analysis of Cracks Handbook, Third Edition , 2000 .
[21] A mixed mode fatigue crack closure model , 1985 .
[22] K. Minoshima,et al. Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation , 1998 .
[23] R. Mullen,et al. Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens† , 1999, Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.
[24] Mitsuhiro Shikida,et al. Tensile-mode fatigue testing of silicon films as structural materials for MEMS , 2001 .
[25] R. Ritchie. Mechanisms of fatigue-crack propagation in ductile and brittle solids , 1999 .
[26] Quasi-static/cyclic loading tests of nanometric SiO/sub 2/ wires using AFM technique for NEMS designs , 2002, Proceedings of the 2nd IEEE Conference on Nanotechnology.