论文信息 - Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching - 字舞流文

Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching

W. Chiappim | M. Fraga | R. Pessoa | J. Leitão | A. S. S. Sobrinho | Júlia Karnopp | L.C.D. Gonçalves | Benedito Botan Neto | Michaela Shiotani | João Pedro Chaves