Mechanically Driven Microtweezers

This paper presents a simplified method of fabricating a fundamental MEMS tool: microtweezers. The tweezers presented here require no power, but instead augment a standard microprobe station in which the axis controls allow for both controlled motion of the tweezer tips and for full three-dimensional maneuverability. This technique allows for a broad range of tweezer styles (straight and serrated tips) and sizes (microns to millimeters). The unique design also affords extraordinarily delicate control that is potentially beneficial for applications in micro-assembly, electrophysiology, and micro-dissection.Copyright © 2003 by ASME