Low insertion loss and high isolation capacitive RF MEMS switch with low pull-in voltage

[1]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[2]  W. M. Van Spengen,et al.  Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations , 2012 .

[3]  Youngmin Kim,et al.  A Non-Contact-Type RF MEMS Switch for 24-GHz Radar Applications , 2009, Journal of Microelectromechanical Systems.

[4]  Egidio Ragonese,et al.  24-GHz ultra-wideband transmitter for vehicular short-range radar applications , 2009, IET Circuits Devices Syst..

[5]  Chean Hung Lai,et al.  Longer MEMS Switch Lifetime Using Novel Dual-Pulse Actuation Voltage , 2009, IEEE Transactions on Device and Materials Reliability.

[6]  Patrick Pons,et al.  Planarization optimization of RF-MEMS switches with a gold membrane , 2010 .

[7]  Che-Heung Kim.  Mechanically Coupled Low-Voltage Electrostatic Resistive RF Multithrow Switch , 2012, IEEE Transactions on Industrial Electronics.

[8]  Dimitrios Peroulis,et al.  Estimating residual stress, curvature and boundary compliance of doubly clamped MEMS from their vibration response , 2013 .

[9]  Ai Qun Liu,et al.  Improvement of isolation for MEMS capacitive switch via membrane planarization , 2005 .

[10]  R. R. Mansour,et al.  RF MEMS Satellite Switch Matrices , 2011, IEEE Microwave Magazine.

[11]  K. Nagendra,et al.  Fabrication of low pull-in voltage RF MEMS switches on glass substrate in recessed CPW configuration for V-band application , 2012 .

[12]  E. Papandreou,et al.  Comparative study of AlN dielectric films' electrical properties for MEMS capacitive switches , 2014 .

[13]  Victor M. Bright,et al.  Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys , 2007 .

[14]  K. Entesari,et al.  Tuning in to RF MEMS , 2009, IEEE Microwave Magazine.

[15]  Yasser Mafinejad,et al.  Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys , 2013 .

[16]  G. Teyssedre,et al.  Dielectric layers for RF-MEMS switches: Design and study of appropriate structures preventing electrostatic charging , 2012, 2011 - 14th International Symposium on Electrets.

[17]  D. Caratelli,et al.  Accurate Time-Domain Modeling of Reconfigurable Antenna Sensors for Non-Invasive Melanoma Skin Cancer Detection , 2012, IEEE Sensors Journal.

[18]  Rodica Ramer,et al.  A novel RF MEMS switch with novel mechanical structure modeling , 2010 .

[19]  Ai Qun Liu,et al.  Characterization and optimization of dry releasing for the fabrication of RF MEMS capacitive switches , 2007 .

[20]  Gabriel M. Rebeiz,et al.  RF MEMS switches: status of the technology , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[21]  Benno Margesin,et al.  Controlling stress and stress gradient during the release process in gold suspended micro-structures , 2010 .

[22]  Fabrice Casset,et al.  Planarization of photoresist sacrificial layer for MEMS fabrication , 2007 .

[23]  Yasser Mafinejad,et al.  Characterization and optimization to improve uneven surface on MEMS bridge fabrication , 2015, Displays.