论文信息 - A high-order terminal iterative learning control scheme [RTP-CVD application]

A high-order terminal iterative learning control scheme [RTP-CVD application]

A high-order terminal iterative learning control (ILC) scheme is proposed where only the terminal output tracking error instead of the entire output trajectory tracking error is used to update the control profile. A convergence condition is obtained for a class of uncertain discrete-time time-varying linear systems. An application example is presented, by simulation, for a rapid thermal processing chemical vapor deposition (RT-PCVD) thickness control problem in the wafer fab industry.

YangQuan Chen | Changyun Wen | Jian-Xin Xu

[1] Mingxuan Sun,et al. Robust higher order repetitive learning control algorithm for tracking control of delayed repetitive systems , 1992, [1992] Proceedings of the 31st IEEE Conference on Decision and Control.

[2] Suguru Arimoto,et al. Bettering operation of Robots by learning , 1984, J. Field Robotics.

[3] Y. Chen,et al. Drag coefficient curve identification of projectiles from flight tests via optimal dynamic fitting , 1997 .

[4] P. Lucibello. Repositioning control of robotic arms by learning , 1994 .

[5] Sudarshan P. Bhat,et al. Solutions to Point-to-Point Control Problems using Laplace Transform Technique , 1990, 1990 American Control Conference.

[6] Tong-heng Lee,et al. An Iterative Learning Control In Rapid Thermal Processing , 1997 .