A 134-pixel CMOS sensor for combined time-of-flight and Optical Triangulation 3-D imaging

This paper describes the design and characterization of a linear sensor suitable for distance measurements based on both Optical Triangulation (OT) and Indirect Time of Flight (I-TOF) techniques. A 134-pixel array has been fabricated in a standard 0.35-µm 2P4M 3.3V CMOS technology, and a complete characterization has been performed showing sub-mm precision in OT mode at 131kvoxel/s in the short range, and a maximum of 8.5% error in I-TOF mode at 125voxel/s for target distance up to 5m.

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