A novel 5DOF thin coplanar nanometer-scale stage

Abstract To minimize the size of a stage with more DOF motion, this paper concentrates on the design, manufacturing process and control of a 5DOF thin coplanar nanometer-scale stage with high accuracy and multiple DOF motion. This paper uses the features of a flexible structure to develop a 200 mm × 200 mm × 35 mm thin coplanar nanometer-scale stage with 5DOF that allows the increase or decrease of axis action in accordance with various needs. The flexible structure of the thin coplanar nanometer-scale stage includes a cylindrical flexible body and an arc flexible body. The thin coplanar nanometer-scale stage allows for three-translational and two-rotational motions and is provided with eight piezoelectric actuators—one on the X -axis, another on the Y -axis, and the others on the Z -axis. The displacement characteristics of the output member of the stage were measured with the built-in capacitive sensors. It also used an analysis and identification controller design method for piezoelectric actuated systems. From the results, it can be seen that the performance of this controller is good and 10 nm controlling error of the step input can be obtained. The controlling error of the rotational angle is about 0.004 arcsec.

[1]  Akira Shimokohbe,et al.  A six-degrees of freedom fine motion mechanism , 1989 .

[2]  Chih-Liang Chu,et al.  A novel long-travel piezoelectric-driven linear nanopositioning stage , 2006 .

[3]  Musa Jouaneh,et al.  Design and characterization of a low-profile micropositioning stage , 1996 .

[4]  Shuo-Hung Chang,et al.  A precision piezodriven micropositioner mechanism with large travel range , 1998 .

[5]  Wen-Yuh Jywe,et al.  A four-degrees-of-freedom microstage for the compensation of eccentricity of a roundness measurement machine , 2004 .

[6]  S H Chang,et al.  An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[7]  Ralph C. Merkle.  A new family of six degrees of freedom positional devices , 1997 .

[8]  Chung Kai Tseng,et al.  An Ultra-Precision XYΘ Z Piezo-Micropositioner Part II : Experiment and Performance , 1999 .

[9]  B. D. Coleman,et al.  A constitutive relation for rate-independent hysteresis in ferromagnetically soft materials , 1986 .

[10]  Willem L. De Koning,et al.  State-space analysis and identification for a class of hysteretic systems , 2001, Autom..

[11]  Shuo-Hung Chang,et al.  An ultra-precision XY/spl Theta//sub Z/ piezo-micropositioner. II. Experiment and performance , 1999 .

[12]  Branislav Borovac,et al.  A platform for micropositioning based on piezo legs , 2001 .

[13]  M. Hodgdon.  Applications of a theory of ferromagnetic hysteresis , 1988 .

[14]  Akira Inagaki,et al.  Ultra precision wafer positioning by six-axis micro-motion mechanism , 1990 .

[15]  R. L. Smith,et al.  Electrostatic inchworm microsystem with long range translation , 2004 .

[16]  Shuo-Hung Chang,et al.  An Ultra-Precision XYθZ Piezo-Micropositioner Part I: Design and Analysis , 1999 .