Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors
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Ke Xu | Roland A. Fischer | Anjana Devi | Detlef Rogalla | D. Barreca | A. Devi | R. Fischer | Ke Xu | H. Becker | T. Arcos | Sun Ja Kim | D. Rogalla | M. Winter | Davide Barreca | Hans-Werner Becker | D. Bekermann | Manish Banerjee | Nagendra Babu Srinivasan | Huaizhi Zhu | Manuela Winter | Teresa de los Arcos | Daniela Bekermann | M. Banerjee | Huaizhi Zhu | N. B. Srinivasan | R. Fischer
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