Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

This paper presents the fabrication and characterization of a novel fully integrated micro electromagnetic vibration energy harvester using micro-patterning of bonded magnets. The magnetic material utilized is a polymer composite, consisting of a commercially available NdFeB powder dispersed in epoxy resin to a weight loading percentage of 90%. The prototype is fabricated using UV-LIGA technology and microelectroplating technology. The whole volume of the structure is about 20 mm3. Testing results show that the fabricated vibration energy harvesters can generate a maximum peak-peak voltage of 20.9 μV at the device's resonance frequency of 365 Hz and input acceleration of 1 g (9.8 m/s2).

[1]  D.P. Arnold,et al.  Review of Microscale Magnetic Power Generation , 2007, IEEE Transactions on Magnetics.

[2]  E. Koukharenko,et al.  Fabrication and Test of Integrated Micro-Scale Vibration Based Electromagnetic Generator , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[3]  D. Arnold,et al.  Permanent Magnets for MEMS , 2009, Journal of Microelectromechanical Systems.

[4]  Saibal Roy,et al.  Design , fabrication and test of integrated microscale vibration-based electromagnetic generator , 2008 .

[5]  Yiannos Manoli,et al.  FLEXIBLE POLYIMIDE FILM TECHNOLOGY FOR VIBRATION ENERGY HARVESTING , 2009 .

[6]  Susumu Sugiyama,et al.  A micro electromagnetic low level vibration energy harvester based on MEMS technology , 2009 .

[7]  Yonggang Jiang,et al.  Fabrication of a vibration-driven electromagnetic energy harvester with integrated NdFeB/Ta multilayered micro-magnets , 2011 .

[8]  Farid Ullah Khan,et al.  Copper foil-type vibration-based electromagnetic energy harvester , 2010 .

[9]  Tuna Balkan,et al.  An electromagnetic micro power generator for wideband environmental vibrations , 2008 .

[10]  David P. Arnold,et al.  FULLY BATCH-FABRICATED MEMS MAGNETIC VIBRATIONAL ENERGY HARVESTERS , 2009 .

[11]  Tao Dong,et al.  Modeling and experimental verification of low-frequency MEMS energy harvesting from ambient vibrations , 2011 .

[12]  Guifu Ding,et al.  A MICRO ELECTROMAGNETIC VIBRATION ENERGY HARVESTER WITH SANDWICHED STRUCTURE AND AIR CHANNEL FOR HIGH ENERGY CONVERSION EFFICIENCY , 2009 .

[13]  H. Kulah,et al.  A micro power generator with planar coils on parylene cantilevers , 2008, 2008 Ph.D. Research in Microelectronics and Electronics.

[14]  J.M. Conrad,et al.  A survey of energy harvesting sources for embedded systems , 2008, IEEE SoutheastCon 2008.

[15]  G. Ding,et al.  Fabrication and Characterization of Bonded NdFeB Microstructures for Microelectromechanical Systems Applications , 2011 .