论文信息 - Optimized EUV mask absorber stack for improved imaging by reducing roughness and crystallinity of alternative absorber materials - 字舞流文

Optimized EUV mask absorber stack for improved imaging by reducing roughness and crystallinity of alternative absorber materials

Vicky Philipsen | Eric Hendrickx | Marc Heyns | Frank Scholze | Arash Edrisi | Vu Luong | Obert Wood | Robbert Wilhelmus Elisabeth van de Kruijs