论文信息 - Evolution of nanoripples on silicon by gas cluster-ion irradiation - 字舞流文

Evolution of nanoripples on silicon by gas cluster-ion irradiation

L. Tu | W. Chu | N. Ho | H. Seo | Q. Y. Chen | P. V. Chinta | P. Wadekar | O. Lozano | D. Wijesundera | Buddhi P. Tilakaratne | X. M. Wang