X-Ray Microanalysis of Thin Surface Films and Coatings

Abstract. The paper gives an overview of the present knowledge in the field of X-ray analysis of surface films and more generally stratified specimens. The aim of the paper is not to report the details and formulas of the available quantitative procedures, but to concentrate on the general ideas and orders of magnitude illustrating the capability and limits of the method, and on the optimal adaptation of the operating conditions to every particular problem. The various specific pitfalls which can be encountered are pointed out, in particular the fluorescence effects when using high-energy X-ray lines, or the anomalies due to chemical bonding, absorption uncertainties, and contamination effects when soft radiations are employed.