Dynamic calibration of a shear-stress sensor using Stokes-layer excitation

The design and implementation of a novel dynamic calibration technique for shear-stress sensors is presented. This technique uses the oscillating wall shear stress generated by a traveling acoustic wave as a known input to the shear-stresssensor.Asilicon-micromachined, eoating-element shear-stresssensorhasbeen dynamicallycalibrated up to 4 kHz using this method. These data represent the e rst broadband, experimental verie cation of the dynamic response of a shear-stress sensor.

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