The independent metering system decouples the meter-in and meter-out flows of the chamber, giving extra control flexibility and can reducing energy consumption while keeping motion control accuracy. The control performance of the independent metering system is significantly determined by the valve characteristics. Valve nonlinearities, such as deadband, nonlinear flow gain, and leakage, may restrict the control accuracy. To address the issue and improve system control precision, the nonlinearities of the valve need to be further modeled. In this study, a nonlinear valve flow model is proposed to accurately depict the relationships between the flow rate, pressure drop, and input voltage. The valve deadband is compensated by the static inverse function, while a certain polynomial projection function is used to mimic the nonlinear flow curve outside the deadband. To deal with uncertainties and nonlinearities in the independent metering system, an adaptive robust control approach is synthesized. The least squares estimation law is adopted to online adapt the valve parameter and other system parameters. Comparative experiments were carried out to illustrate the effectiveness of the proposed approach. The results show that the valve flow nonlinearities are further captured by the proposed model, and the independent metering system performed a higher-level control precision.