A 20–40 GHz tunable MEMS bandpass filter with enhanced stability by gold-vanadium micro-corrugated diaphragms
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[1] Dimitrios Peroulis,et al. Tunable high-isolation W-band bandstop filters , 2015, 2015 IEEE MTT-S International Microwave Symposium.
[2] K. Sato,et al. Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy , 2009, Journal of Microelectromechanical Systems.
[3] C. Goldsmith,et al. Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes , 2009, IEEE Transactions on Microwave Theory and Techniques.
[4] W. Brown,et al. The influence of vanadium alloying on the elevated-temperature mechanical properties of thin gold films , 2007 .
[5] Dimitrios Peroulis,et al. A 23–35 GHz MEMS tunable all-silicon cavity filter with stability characterization up to 140 million cycles , 2014, 2014 IEEE MTT-S International Microwave Symposium (IMS2014).
[6] D. Peroulis,et al. Creep-resistant nanocrystalline gold-vanadium alloyed microcorrugated diaphragms (MCDS) , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
[7] Mark McLean,et al. Temperature-Dependent Viscoelasticity in Thin Au Films and Consequences for MEMS Devices , 2010, Journal of Microelectromechanical Systems.