Millisecond flash lamp annealing of shallow implanted layers in Ge
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E. Simoen | Trudo Clarysse | Wolfgang Skorupa | Matthias Posselt | Arndt Mücklich | B. Schmidt | E. Simoen | M. Posselt | W. Skorupa | A. Mücklich | T. Clarysse | Bernd Schmidt | T. Schumann | R. Grötzschel | V. Heera | Rainer Grötzschel | V. Heera | C. Wündisch | T. Schumann | H. Hortenbach | C. Wündisch | H. Hortenbach
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