Fabrication of an UltraLow-Resistance Ohmic Contact to MWCNT–Metal Interconnect Using Graphitic Carbon by Electron Beam-Induced Deposition (EBID)

Reduction in contact resistance is one of the foremost challenges for carbon nanotube/graphene nanodevices. In this study, we present a novel fabrication process for low-temperature, Ohmic contact between open-ended multiwalled carbon nanotubes (MWCNTs) and metal interconnects using graphitic carbon deposited via electron beam-induced deposition (EBID). The electrical and structural properties of the contact interface are characterized for making connection to the single (outermost) shell only, as well as to multiple conducting shells of MWCNTs. In addition to establishing the scaling relationship between the carbon contact length and the resulting contact resistance, the magnitude of the contact resistance has been quantified with and without post-deposition thermal annealing. The results indicate that the contact is Ohmic in nature, and ranges from 26.5 kΩ for the connection made to the outermost shell of an MWCNT down to just 116 Ω for the multiple-shell connection performed via a process suggested through the EBID process simulations. These results provide a significant advance in application of MWCNTs to future interconnect technologies.

[1]  A. Fedorov,et al.  Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube , 2009 .

[2]  A. Fedorov,et al.  Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy , 2007 .

[3]  Wahyu Setyawan,et al.  Nanotube electronics: Large-scale assembly of carbon nanotubes , 2003, Nature.

[4]  A. Fedorov,et al.  Thermally induced transformations of amorphous carbon nanostructures fabricated by electron beam induced deposition. , 2011, ACS applied materials & interfaces.

[5]  Dynamic growth of carbon nanopillars and microrings in electron beam induced dissociation of residual hydrocarbons. , 2008, Ultramicroscopy.

[6]  R. Reifenberger,et al.  Determining the optimal contact length for a metal/multiwalled carbon nanotube interconnect , 2008 .

[7]  T. D. Yuzvinsky,et al.  Shrinking a carbon nanotube. , 2006, Nano letters.

[8]  Y. Bando,et al.  Superstrong Low‐Resistant Carbon Nanotube–Carbide–Metal Nanocontacts , 2010, Advanced materials.

[9]  R. Krupke,et al.  Probing dielectrophoretic force fields with metallic carbon nanotubes , 2006 .

[10]  Arnaud Magrez,et al.  Uniformly dispersed deposition of colloidal nanoparticles and nanowires by boiling , 2007 .

[11]  A J Pérez-Jiménez,et al.  First-principles phase-coherent transport in metallic nanotubes with realistic contacts. , 2003, Physical review letters.

[12]  Fumihito Arai,et al.  Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations , 2003, Proc. IEEE.

[13]  Konrad Rykaczewski,et al.  The effect of the geometry and material properties of a carbon joint produced by electron beam induced deposition on the electrical resistance of a multiwalled carbon nanotube-to-metal contact interface , 2010, Nanotechnology.

[14]  Opening of aligned carbon nanotube ends via room-temperature sputter etching process , 2005 .

[15]  Kyong-Hoon Lee,et al.  Toward large-scale integration of carbon nanotubes. , 2004, Langmuir : the ACS journal of surfaces and colloids.

[16]  K. Gamo,et al.  Contact resistance of multiwall carbon nanotubes , 2003 .

[17]  Saroj K. Nayak,et al.  Effect of H2O adsorption on electron transport in a carbon nanotube , 2002 .

[18]  G. Groeseneken,et al.  A study of Joule heating-induced breakdown of carbon nanotube interconnects , 2011, Nanotechnology.

[19]  In-Seok Yeo,et al.  Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability , 2009 .

[20]  A. Fedorov,et al.  Light‐Induced Plasmon‐Assisted Phase Transformation of Carbon on Metal Nanoparticles , 2012 .

[21]  A. Fedorov,et al.  Inert gas jets for growth control in electron beam induced deposition , 2011 .

[22]  H J Li,et al.  Multichannel ballistic transport in multiwall carbon nanotubes. , 2005, Physical review letters.

[23]  Sub-20 nm short channel carbon nanotube transistors. , 2004, Nano letters.

[24]  John E. Anthony,et al.  Thermogravimetric Analysis of the Oxidation of Multiwalled Carbon Nanotubes: Evidence for the Role of Defect Sites in Carbon Nanotube Chemistry , 2002 .

[25]  Thomas J. Morrow,et al.  Programmed Assembly of DNA-Coated Nanowire Devices , 2009, Science.

[26]  K. Banerjee,et al.  Circuit Modeling and Performance Analysis of Multi-Walled Carbon Nanotube Interconnects , 2008, IEEE Transactions on Electron Devices.

[27]  Q. Fu,et al.  Electrical transport measurements of the side-contacts and embedded-end-contacts of platinum leads on the same single-walled carbon nanotube , 2009, Nanotechnology.

[28]  Hyunhyub Ko,et al.  Nanotube surface arrays: weaving, bending, and assembling on patterned silicon. , 2004, Physical review letters.

[29]  Zhihong Chen,et al.  Length scaling of carbon nanotube transistors. , 2010, Nature nanotechnology.

[30]  S. Paulson,et al.  In situ resistance measurements of strained carbon nanotubes , 1999, cond-mat/9905304.

[31]  Siegmar Roth,et al.  Controlled Adsorption of Carbon Nanotubes on Chemically Modified Electrode Arrays , 1998 .

[32]  Jeffrey Bokor,et al.  Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology , 2004 .

[33]  M. Dresselhaus,et al.  Physical properties of carbon nanotubes , 1998 .

[34]  James D. Meindl,et al.  Carbon nanotube interconnects , 2007, ISPD '07.

[35]  Hong-Yu Chen,et al.  Low-Resistance Electrical Contact to Carbon Nanotubes With Graphitic Interfacial Layer , 2012, IEEE Transactions on Electron Devices.

[36]  Arnaud Magrez,et al.  Controlled positioning of carbon nanotubes by dielectrophoresis: insights into the solvent and substrate role. , 2010, ACS nano.

[37]  Patrik Hoffmann,et al.  Gas-assisted focused electron beam and ion beam processing and fabrication , 2008 .

[38]  Zhong Lin Wang,et al.  Carbon nanotube quantum resistors , 1998, Science.

[39]  J. Tersoff.  Contact resistance of carbon nanotubes , 1999 .

[40]  R. Krupke,et al.  Separation of Metallic from Semiconducting Single-Walled Carbon Nanotubes , 2003, Science.

[41]  Kim Y. Lee,et al.  Multiple electron-beam lithography , 2001 .

[42]  Irving P. Herman,et al.  Precise positioning of single-walled carbon nanotubes by ac dielectrophoresis , 2006 .

[43]  Work function of carbon nanotubes , 2000 .