论文信息 - Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD - 字舞流文

Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

R. Tokas | S. Gosavi | Shashi B. Singh | N. Chand | S. Kulkarni | D. Patil | R. Dey | N. Sahoo | D. Bhattacharya | S. Venkateshwaran | A. Biswas