The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System
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Cheng-Che Tsai | S. Chu | Chia-Ling Wei | Yunhui Liu | Hsueh‐Yu Kao | Ze-Hui Chen | Cheng-Ying Li | Yi-Hsun Wang | Yen-Hsiang Huang | Po-Yu Hsiao | Cheng‐Che Tsai | Hsueh-Yu Kao | S. Chu