Nanoscale thin film transfer using elastomer-covered roll with buffer cavities

In this study, we present plate-to-roll transfer of nanoscale thin films using an elastomer-covered roll with buffer cavities. During the roll transfer process, defects such as cracks and wrinkles in the transferred film are easily generated. To suppress the defects, the roll’s mechanical behavior should be analyzed before any improvements can be made to the roll and subsequently the transfer quality. Finite element analysis was adopted to analyze the roll’s mechanical behavior and it was shown that the hoop and axial strain can be reduced as compared to the conventional roll by using the proposed roll. 46-nm gold thin films (9×9 mm2) were transferred using the proposed roll, and the quality of the transferred film was improved. The proposed roll in this study can be used in roll transfer processes for improving the quality of the transferred thin film.

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