Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography

This letter describes an approach for recording three-dimensional (3D) periodic structures in a photosensitive polymer using a single diffraction element mask. The mask has a central opening surrounded by three diffraction gratings oriented 120° relative to one another such that the three first order diffracted beams and the nondiffracted laser beam give a 3D spatial light intensity pattern. Structures patterned in this polymer using 1.0 and 0.56 μm grating periods have hexagonal symmetry with micron- to submicron-periodicity over large substrate area. Band structure calculations of these low index contrast materials predict photonic gaps in certain high symmetry directions.

[1]  Steven G. Johnson,et al.  Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis. , 2001, Optics express.

[2]  Satoru Shoji,et al.  Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin , 2000 .

[3]  M. M. Sigalas,et al.  Optical photonic crystals fabricated from colloidal systems , 1999, 2111.04905.

[4]  Jane F. Bertone,et al.  Single-Crystal Colloidal Multilayers of Controlled Thickness , 1999 .

[5]  M. Hutley.  Interference (holographic) diffraction gratings , 1976 .

[6]  Axel Scherer,et al.  Fabrication of Photonic Band-Gap Crystals , 1995 .

[7]  J. Joannopoulos,et al.  Experimental demonstration of guiding and bending of electromagnetic waves in a photonic crystal , 1998, Science.

[8]  Susumu Noda,et al.  Highly confined waveguides and waveguide bends in three-dimensional photonic crystal , 1999 .

[9]  E. Costard,et al.  Photonic band gaps and holography , 1997 .

[10]  Lalgudi V. Natarajan,et al.  Holographic Formation of Electro‐Optical Polymer–Liquid Crystal Photonic Crystals , 2002 .

[11]  Anne Talneau,et al.  Photonic-crystal ultrashort bends with improved transmission and low reflection at 1.55 μm , 2002 .

[12]  D. Larkman,et al.  Photonic crystals , 1999, International Conference on Transparent Optical Networks (Cat. No. 99EX350).

[13]  Sven Matthias,et al.  Three-dimensional photonic crystals based on macroporous silicon with modulated pore diameter , 2001 .

[14]  G. Ozin,et al.  Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres , 2000, Nature.

[15]  Orlin D. Velev,et al.  Structured porous materials via colloidal crystal templating: from inorganic oxides to metals , 2000 .

[16]  R. G. Denning,et al.  Fabrication of photonic crystals for the visible spectrum by holographic lithography , 2000, Nature.

[17]  Eli Yablonovitch,et al.  Photonic band-gap crystals , 1993 .

[18]  Susumu Noda,et al.  Trapping and emission of photons by a single defect in a photonic bandgap structure , 2000, Nature.

[19]  Theresa S. Mayer,et al.  Fabrication of two-dimensional photonic crystals using interference lithography and electrodeposition of CdSe , 2001 .

[20]  Masaya Notomi,et al.  Superprism Phenomena in Photonic Crystals , 1998 .