Pulsed laser annealing for advanced technology nodes: Modeling and calibration
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S. Kerdilès | P. Acosta-Alba | K. Huet | C. Licitra | F. Mazzamuto | S. Lombardo | L. Dagault | J. Hartmann | P. Raynal | A. L. Magna | J. Aubin | Benoit Curvers | Armand Verstraete | Bobby Lespinasse | Fulvio Mazzamuto | Alberto Sciuto