Crystallization of tantalum oxide formed by PLD

[1]  T. Hino,et al.  Corrosion Resistance of Tantalum-Oxide Films Deposited by PLD. , 1999 .

[2]  T. Hino,et al.  Formation of Ta 2 O 5 Films by Laser Ablation from Ta Target under Oxygen Atmosphere , 1997 .

[3]  N. Higashi,et al.  Optical and Structural Properties of Tantalum Pentoxide Thin Films by Ion Assisted Deposition Method with Radio Frequency Ion Source , 1996 .

[4]  H. Kidoh,et al.  Magneto-Optical Characteristics of Bi-Substituted Rare-Earth Iron Garnet Films Prepared by Laser Ablation , 1994 .

[5]  D. Fork,et al.  Epitaxial BaTiO3/MgO Structure Grown on GaAs(100) by Pulsed Laser Deposition* , 1993 .

[6]  Koichi Kuroiwa,et al.  Investigation on Leakage Current Reduction of Photo‐CVD Tantalum Oxide Films Accomplished by Active Oxygen Annealing , 1992 .

[7]  T. Venkatesan,et al.  Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material , 1987 .

[8]  S. Kimura,et al.  Dielectric Characteristics of Double Layer Structure of Extremely Thin Ta2 O 5 / SiO2 on Si , 1987 .

[9]  S. Kimura,et al.  Leakage‐Current Increase in Amorphous Ta2 O 5 Films Due to Pinhole Growth during Annealing Below 600°C , 1983 .

[10]  L. Young,et al.  Optical and electrical properties of thermal Tantalum oxide films on silicon , 1981, IEEE Transactions on Electron Devices.

[11]  P. Young dc electrical conduction in thin Ta2O5 films. I. Bulk‐limited conduction , 1976 .

[12]  R. Tauber,et al.  Selected Properties of Pyrolytic Ta[sub 2]O[sub 5] Films , 1973 .

[13]  N. Terao Structure des Oxides de Tantale , 1967 .

[14]  P. Kofstad On The Defect Structure of Ta2 O 5 , 1962 .