Development of submicrometer resolution x-ray CT system at SPring-8

A high spatial resolution x-ray CT system was developed at SPrng-8. The experiments were performed at the in-vacuum type undulator beamline BL47XU. A Si (111) double crystal monochromator is cooled with liquid nitrogen. A high precision rotation stage was used for sample rotation stage. Transmitted images were measured with an image detector. As the results of performance tests, it is considered that the spatial resolution of at least 1 micrometers was achieved with this system. The three-dimensional textures of eutectic alloy and a fossil of diatom were observed with this system.