Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading.

Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics.

[1]  W. I. Milne,et al.  ZnO-Based FBAR resonators with carbon nanotube electrodes , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2]  Didier Belot,et al.  A novel architecture of a tunable bandpass BAW-filter for a WCDMA transceiver , 2006 .

[3]  G. Sauerbrey.  Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung , 1959 .

[4]  Johannes G.E. Gardeniers,et al.  Preferred orientation and piezoelectricity in sputtered ZnO films , 1998 .

[5]  Wei Pang,et al.  A Temperature-Stable Film Bulk Acoustic Wave Oscillator , 2008, IEEE Electron Device Letters.

[6]  W. Norde.  Energy and entropy of protein adsorption. , 1992 .

[7]  W. Norde,et al.  Driving forces for protein adsorption at solid surfaces , 1996 .

[8]  Lifeng Qin,et al.  Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations , 2011 .

[9]  Gunilla Wingqvist,et al.  AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review , 2010 .

[10]  A. Flewitt,et al.  Stability of thin film transistors incorporating a zinc oxide or indium zinc oxide channel deposited by a high rate sputtering process , 2009 .

[11]  B. Otis,et al.  A digitally compensated 1.5 GHz CMOS/FBAR frequency reference , 2010, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  G. Sauerbrey,et al.  Use of quartz vibration for weighing thin films on a microbalance , 1959 .

[13]  Wolfram Wersing,et al.  Shear mode FBARs as highly sensitive liquid biosensors , 2006 .

[14]  G. Eckstein,et al.  First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles. , 2004, Biosensors & bioelectronics.

[15]  S. Furukawa,et al.  Anomalous temperature dependence of the sound velocities of SiO2-TiO2 glasses , 1995 .

[16]  Patricia M. Nieva,et al.  Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures , 2000 .

[17]  Katsuhisa Tanaka,et al.  Elastic Anomaly and Structure of F-Doped Silica Glass , 1991 .

[18]  I. B. Kobiakov.  Elastic, piezoelectric and dielectric properties of ZnO and CdS single crystals in a wide range of temperatures , 1980 .

[19]  G. Wingqvist,et al.  A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications , 2009 .

[20]  Paul Muralt,et al.  Bulk acoustic wave resonator operating at 8 GHz for gravimetric sensing of organic films , 2006 .

[21]  H. Morkoç,et al.  Zinc Oxide: Fundamentals, Materials and Device Technology , 2009 .

[22]  Abu Nayeem Mohammad Salahuddin,et al.  Influence of temperature on the intrinsic viscosities of proteins in random coil conformation. , 1974, Biochemistry.

[23]  Joon-Tae Song,et al.  Detection of carcinoembryonic antigen using AlN FBAR , 2010 .

[24]  Jonathan Griffiths,et al.  Guided propagation of surface acoustic waves and piezoelectric field enhancement in ZnO/GaAs systems , 2011 .

[25]  Anthony Dickherber,et al.  Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator , 2007 .