High performance miniaturized NEMS sensors Toward co-integration with CMOS?
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É. Colinet | P. Batude | O. Rozeau | T. Ernst | C. Dupré | J. Arcamone | E. Ollier | L. Duraffourg | F. Ricoul | C. Marcoux | V. Gouttenoire | J. Philippe | O. Martin | G. Billiot