The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O2
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J. Lunze | P. Awakowicz | R. Brinkmann | J. Schulze | C. Woelfel | D. Eremin | B. Berger | M. Oberberg | Dennis Engel | Maira Buschheuer | D. Engel | C. Wölfel | J. Lunze | M. Buschheuer