论文信息 - Indium tin oxide coatings on flexible and rigid substrates for application in smart windows

Indium tin oxide coatings on flexible and rigid substrates for application in smart windows

Transparent conducting tin-doped indium oxide (ITO) thin films were deposited on Teflon and glass substrates using RF magnetron sputtering technique from an ITO ceramic target. The substrates were loaded on a cylindrical drum maintained at a temperature of 15 ± 2°C and rotated at a constant rate of 6 rpm. At the optimal deposition condition, the ITO thin films with maximum transmission of 93% and a minimum sheet resistance of 10Ω/∠ was achieved.

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