论文信息 - The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

We describe the realization of a symmetric integrated channel waveguide Mach-Zehnder sensor which uses the evanescent field to detect small refractive-index changes (?nmin ? 1 × 10?4) near the guiding-layer surface. This guiding layer consists of ridge structures with a height of 3 nm and a width of 4 ?m made in Si3N4. This layer has a thickness of 100 nm. The sensor device has been tested with glucose solutions of different bulk refractive indices. Results of a slab-model calculation are in good agreement with obtained experimental results. The feasibility of applying this sensor for immunosensing, detecting directly the binding of antigen to an antibody receptor surface, is shown with antibody-antigen binding experiments.

[1] Rene Heideman,et al. Feasibility of optical waveguide immunosensors for pesticide detection : physical aspects , 1995 .

[2] M. T. Flanagan,et al. Scattering in planar surface waveguide immunosensors , 1993 .

[3] W. Lukosz,et al. Sensitivity of grating couplers as integrated-optical chemical sensors , 1989 .

[4] Jan Ingenhoff,et al. A gas sensor based on an integrated optical Mach-Zehnder interferometer , 1992 .

[5] J. Greve,et al. The critical sensor: a new type of evanescent wave immunosensor. , 1996, Biosensors & bioelectronics.

[6] W. Lukosz,et al. Principles and sensitivities of integrated optical and surface plasmon sensors for direct affinity sensing and immunosensing , 1991 .

[7] Rene Heideman,et al. Performance of a highly sensitive optical waveguide Mach-Zehnder interferometer immunosensor , 1993 .

[8] Albrecht Brandenburg,et al. Integrated optical gas sensors using organically modified silicates as sensitive films , 1993 .