Low-loss III-V semiconductor optical waveguides

A review is presented of recent progress in low-loss III-V semiconductor integrated optics for the 1-1.6 mu m wavelength range, including propagation, bending, coupling, and modulator losses. Tradeoffs between loss and other performance issues are discussed in detail. The authors show that significant advances have resulted in a research shift from work on the general issues of improved material transparency and straight guide propagation loss to more application-specific areas. In particular, size-loss tradeoffs in bend and modulator structures remain key issues for widespread use of III-V integrated optics. >

[1]  Donald R. Larson,et al.  Waveguide loss measurement using photothermal deflection. , 1988, Applied optics.

[2]  P. M. Rodgers,et al.  Optical waveguides in In0.52Al0.48As grown on InP by MBE , 1986 .

[3]  J. Harbison,et al.  GaAs‐on‐InP heteroepitaxial waveguides grown by molecular beam epitaxy , 1988 .

[4]  U. Koren,et al.  Tapered waveguide InGaAs/InGaAsP multiple-quantum-well lasers , 1990, IEEE Photonics Technology Letters.

[5]  E. Kapon,et al.  Low‐loss single‐mode GaAs/AlGaAs optical waveguides grown by organometallic vapor phase epitaxy , 1987 .

[6]  K. Ishida,et al.  Low loss single-mode InGaAs/InAlAs multiquantum well electroabsorption modulator , 1990 .

[7]  R. N. Thurston,et al.  Single‐mode semiconductor optical waveguides with large dimensions suitable for compact bend applications , 1990 .

[8]  Dietrich Marcuse,et al.  Mode conversion caused by surface imperfections of a dielectric slab waveguide , 1969 .

[9]  F. Reinhart,et al.  MOS rib waveguide polarizers , 1980 .

[10]  Marko Erman,et al.  Extremely low loss InP/GaInAsP rib waveguides , 1989 .

[11]  R. A. Pucel,et al.  Design Considerations for Monolithic Microwave Circuits , 1981 .

[12]  Robert J. Deri,et al.  Dynamic etch mask technique for fabricating tapered semiconductor optical waveguides and other structures , 1990 .

[13]  Shyh Wang,et al.  Cross‐talk problems in optical directional couplers , 1984 .

[14]  David Yevick,et al.  Analysis of strongly guiding rib waveguide S-bends: theory and experiment , 1989 .

[15]  Huygens-type formula for curvature loss from dielectric waveguides in optoelectronics , 1987 .

[16]  R. C. Goodfellow,et al.  Attenuation measurements on MOCVD-grown GaAs/GaAlAs optical waveguides , 1983 .

[17]  M. Erman,et al.  Low loss waveguides grown on GaAs using localized vapor phase epitaxy , 1983 .

[18]  W. Sohler,et al.  Loss in low-finesse Ti:LiNbO3 optical waveguide resonators , 1985 .

[19]  Osamu Wada,et al.  Efficient fiber coupling to low-loss diluted multiple quantum well optical waveguides , 1989 .

[20]  E. Kane,et al.  The valence band structure of the III–V compounds☆ , 1962 .

[21]  M. Austin.  GaAs/GaAlAs Curved Rib Waveguides , 1982 .

[22]  E. Garmire.  Optical waveguides in single layers of Ga1−xAlx As grown on GaAs substrates , 1973 .

[23]  P. M. Rodgers,et al.  Low-loss single-mode InP/InGaAsP waveguides grown by MOVPE , 1987 .

[24]  Highly efficient waveguide phase modulator for integrated optoelectronics , 1986 .

[25]  H. Melchior,et al.  Novel method for analysis of curved optical rib-waveguides , 1989 .

[26]  G. J. Davies,et al.  Low-loss optical waveguides in MBE-grown GaAs/GaAlAs heterostructures , 1983 .

[27]  Pallab Bhattacharya,et al.  Single mode optical waveguides and phase shifters using InGaAlAs on InP grown by molecular beam epitaxy , 1990 .

[28]  U. Koren,et al.  Wavelength division multiplexing light source with integrated quantum well tunable lasers and optical amplifiers , 1989 .

[29]  N. Nourshargh,et al.  Simple technique for measuring attenuation of integrated optical waveguides , 1985 .

[30]  L. M. Schiavone,et al.  Scattering in low‐loss GaAs/AlGaAs rib waveguides , 1987 .

[31]  Shih-Yuan Wang,et al.  Low-loss GaAs/GaAlAs strip-loaded waveguides with high coupling efficiency to single-mode fibres , 1985 .

[32]  J. M. Whelan,et al.  Infrared Absorption and Electron Effective Mass inn-Type Gallium Arsenide , 1959 .

[33]  C. Chang-Hasnain,et al.  Integrated external cavity quantum well laser array using single epitaxial growth on a patterned substrate , 1990 .

[34]  P. Buchmann,et al.  Reactive ion etched GaAs optical waveguide modulators with low loss and high speed , 1984 .

[35]  R. R. Bradley,et al.  Narrow, high-NA GaAs/GaAlAs optical waveguides with losses below 0.7±0.1 dB cm-1 , 1987 .

[36]  Dietrich Marcuse,et al.  Radiation losses of dielectric waveguides in terms of the power spectrum of the wall distortion function , 1969 .

[37]  P. Suchoski,et al.  Minimum-mode-size low-loss Ti: LiNbO 3 channel waveguides for efficient modulator operation at 1.3 µm , 1987 .

[38]  E. Kapon,et al.  Birefringent channel waveguides defined by impurity‐induced superlattice disordering , 1988 .

[39]  P. Buchmann,et al.  GaAs single-mode rib waveguides with reactive ion-etched totally reflecting corner mirrors , 1985 .

[40]  H. Takeuchi,et al.  Low-loss single-mode GaAs/AlGaAs miniature optical waveguides with straight and bending structures , 1989 .

[41]  U. Koren,et al.  Antiresonant reflecting optical waveguides for III-V integrated optics , 1987 .

[42]  S. Morasca,et al.  Low-loss ridge optical waveguides in quarternary InGaAlAs/InP grown by MBE , 1987 .

[43]  T. Ikegami,et al.  Reflectivity of mode at facet and oscillation mode in double-heterostructure injection lasers , 1972 .

[44]  A. Ougazzaden,et al.  Low-Loss 3cm Long InP/GaInAsP Rib Waveguides , 1989, Other Conferences.

[45]  L. Johnson,et al.  Low‐loss GaInAsP buried‐heterostructure optical waveguide branches and bends , 1984 .

[46]  S. Y. Wang,et al.  GaAs traveling‐wave polarization electro‐optic waveguide modulator with bandwidth in excess of 20 GHz at 1.3 μm , 1987 .

[47]  C. Sullivan,et al.  Low‐loss AlGaAs optical rectangular waveguides at 830 nm , 1990 .

[48]  A. Glass,et al.  Double doped low etch pit density InP with reduced optical absorption , 1983 .

[49]  P. N. Robson,et al.  Strain-induced optical waveguiding in GaAs epitaxial layers at 1.15 μm , 1979 .

[50]  P. Tien.  Light waves in thin films and integrated optics. , 1971, Applied optics.

[51]  Moty Heiblum,et al.  Analysis of curved optical waveguides by conformal transformation , 1975 .

[52]  E. Marcatili,et al.  Improved coupled-mode equations for dielectric guides , 1986 .

[53]  Peter Dayan,et al.  Semiconductor Waveguides: Analysis Of Coupling Between Rib Waveguides And Optical Fibres , 1985, Other Conferences.

[54]  W. Wiegmann,et al.  Impurity trapping, interface structure, and luminescence of GaAs quantum wells grown by molecular beam epitaxy , 1984 .

[55]  Eli Kapon,et al.  Rib profile effects on scattering in semiconductor optical waveguides , 1988 .

[56]  A. Yi-yan,et al.  Fabrication of submillimeter-radius optical waveguide bends with anisotropic and isotropic wet chemical etchants , 1990 .

[57]  Koji Ishida,et al.  InGaAsP/InP optical switches using carrier induced refractive index change , 1987 .

[58]  S. Namba,et al.  Effects of ion etching on the properties of GaAs. , 1978, Applied optics.

[59]  L. M. Schiavone,et al.  Bend losses in GaAs/AlGaAs optical waveguides , 1987 .

[60]  E. Colas,et al.  Diffusion-limited etching for compact, low-loss semiconductor integrated optics , 1989, IEEE Photonics Technology Letters.

[61]  Hermann A. Haus,et al.  Elimination of cross talk in optical directional couplers , 1985 .

[62]  H. C. Casey,et al.  Concentration dependence of the absorption coefficient for n− and p−type GaAs between 1.3 and 1.6 eV , 1975 .

[63]  P. R. Berger,et al.  InGaAs/GaAs multiquantum-well electroabsorption modulator with integrated waveguide. , 1987, Optics letters.

[64]  E. Marcatili.  Bends in optical dielectric guides , 1969 .

[65]  Low loss GaAs optical waveguides , 1985 .

[66]  S. Korotky,et al.  Optimization of Ti:LiNbO 3 optical waveguides and directional coupler switches for 1.56 µm wavelength , 1986 .

[67]  Uziel Koren,et al.  Compact directional coupler switches using quantum well electrorefraction , 1989 .

[68]  O. Wada,et al.  Bend performance on fibre-matched optical waveguides on InP , 1990 .

[69]  T. Wood.  Multiple quantum well (MQW) waveguide modulators , 1988 .

[70]  Quaternary quantum wells for electro‐optic intensity and phase modulation at 1.3 and 1.55 μm , 1989 .

[71]  R. G. Walker,et al.  Simple and accurate loss measurement technique for semiconductor optical waveguides , 1985 .

[72]  A. Yi-yan,et al.  GaAs/AlGaAs single‐mode optical waveguides with low propagation loss and strong optical confinement , 1990 .

[73]  Hitoshi Kawaguchi.  GaAs rib-waveguide directional-coupler switch with Schottky barriers , 1978 .

[74]  G. Martin,et al.  Optical assessment of the main electron trap in bulk semi‐insulating GaAs , 1981 .

[75]  J. E. Sitch,et al.  Rib waveguide curvature loss: the scalar problem , 1985 .

[76]  W. Bonner,et al.  Infrared reflectance and absorption of N-type InP , 1983 .

[77]  Rajaram Bhat,et al.  Miniature integrated optical beam-splitter in AlGaAs/GaAs ridge waveguides , 1987 .

[78]  P. Buchmann,et al.  Self-adjusted permanent attachment of fibres to GaAs waveguide components , 1986 .

[79]  D. Hall,et al.  Attenuation in planar optical waveguides: Comparison of theory and experiment , 1983 .

[80]  J. Buus.  Analytical approximation for the reflectivity of DH lasers , 1981, IEEE Journal of Quantum Electronics.

[81]  Amnon Yariv,et al.  Optical waveguiding in proton-implanted GaAs , 1972 .

[82]  Y. Kao,et al.  Low‐loss GaAs/AlGaAs optical waveguides and phase modulator on silicon substrate grown by molecular beam epitaxy , 1990 .

[83]  R. Alferness,et al.  InGaP/InP waveguides , 1987 .

[84]  J. P. Harbison,et al.  Low‐loss GaAs/AlGaAs waveguide phase modulator using a W‐shaped index profile , 1988 .

[85]  P. J. Corvini,et al.  Spectral dependence of propagation loss in InP/InGaAsP antiresonant reflecting optical waveguides grown by chemical beam epitaxy , 1987 .

[86]  R J Hawkins,et al.  Polarization, scattering, and coherent effects in semiconductor rib waveguide bends. , 1988, Optics letters.

[87]  E. Kapon,et al.  Integrated external cavity GaAs/AlGaAs lasers using selective quantum well disordering , 1989 .

[88]  W. Burns,et al.  Mode dispersion in diffused channel waveguides by the effective index method. , 1977, Applied optics.

[89]  E. Kapon,et al.  Low-loss multiple quantum well GaInAs/InP optical waveguides , 1989 .

[90]  A. Tate,et al.  GaAs/AlAs Multi-Quantum-Well Optical Waveguides Fabricated by Disordering Superlattices , 1987 .

[91]  F. Auracher,et al.  Coupling of single-mode Ti-diffused LiNbO3 waveguides to single-mode fibers , 1979 .

[92]  C. Henry,et al.  The effect of intervalence band absorption on the thermal behavior of InGaAsP lasers , 1983 .

[93]  J. Currie,et al.  Fabrication, characterization, and analysis of zinc-diffused GaAs waveguides , 1989 .

[94]  Marko Erman,et al.  Mach-Zehnder modulators and optical switches on III-V semiconductors , 1988 .