Synthesizing multi-axis flexure systems with decoupled actuators

Abstract The aim of this paper is to introduce a general systematic approach for synthesizing multi-degree-of-freedom (i.e., multi-axis) flexure-based precision motion systems with decoupled actuators. This approach utilizes the geometric shapes of the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach to help designers rapidly visualize and compare flexure topologies that could be used to successfully decouple any set of actuators intended to drive any set of desired degrees of freedom (DOFs). The ability to correctly synthesize such decoupled systems is important if their stages are intended to be driven by each of their actuators over large ranges without causing their other actuators to (i) experience harmful jamming forces in the case of displacement-based contact actuators, or (ii) displace from their optimally calibrated positions for the case of force-based non-contact actuators. Additionally, such decoupled flexure systems improve the controllability of their stages by minimizing how much the output of any one of their actuators affects the output of their other actuators. This paper provides the systematic steps of the proposed synthesis approach in the context of various case studies.

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