论文信息 - A Combustion-Based MEMS Thermoelectric Power Generator

A Combustion-Based MEMS Thermoelectric Power Generator

A thermoelectric generator with integrated catalytic combustion has been microfabricated and successfully tested. The device consists of a high-temperature silicon-germanium thermopile supported on a thermally insulating silicon nitride membrane. Heat is supplied by catalytic combustion of fuels on the underside of the membrane. Power output has been generated from on-chip autothermal combustion of hydrogen, ammonia and butane, with external power used only to drive mass-flow controllers. The device was stable at temperatures up to 500°C, with thermopile voltages up to 7V and device thermal efficiencies up to 0.02%.

K. Jensen | M. Schmidt | S. Schaevitz | A. Franz

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