Open volumes in SiN films for strained Si transistors probed using monoenergetic positron beams
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A. Uedono | K. Yamabe | Kazuki Ito | T. Arikado | T. Ohdaira | R. Suzuki | T. Moriya | M. Kohno | K. Ikeuchi | T. Otsuka | N. Okumura | T. Nakanishi
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