Energy loss in MEMS resonators and the impact on inertial and RF devices

In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.

[1]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[2]  C. Zener.  INTERNAL FRICTION IN SOLIDS. I. THEORY OF INTERNAL FRICTION IN REEDS , 1937 .

[3]  C. Zener.  INTERNAL FRICTION IN SOLIDS II. GENERAL THEORY OF THERMOELASTIC INTERNAL FRICTION , 1938 .

[4]  A. Burgdorfer.  The Influence of the Molecular Mean Free Path on the Performance of Hydrodynamic Gas Lubricated Bearings , 1959 .

[5]  K. Dransfeld,et al.  Excitation and Attenuation of Hypersonic Waves in Quartz , 1960 .

[6]  H. Ehrenreich,et al.  Absorption of Sound in Insulators , 1961 .

[7]  R. Stephenson.  A and V , 1962, The British journal of ophthalmology.

[8]  重治 小野木,et al.  Journal of Applied physics,Vol.33 : 1962年に発表されたレオロジー関連の論文 , 1963 .

[9]  Physical Review , 1965, Nature.

[10]  R. Christian.  The theory of oscillating-vane vacuum gauges , 1966 .

[11]  H. H. Richardson,et al.  A Study of Fluid Squeeze-Film Damping , 1966 .

[12]  Mikhail Naumovich Kogan,et al.  Rarefied Gas Dynamics , 1969 .

[13]  M. G. Holland,et al.  Critique of Current Theories of Akhieser Damping in Solids , 1970 .

[14]  W. A. Phillips,et al.  Tunneling states in amorphous solids , 1972 .

[15]  B. S. Berry,et al.  Anelastic Relaxation in Crystalline Solids , 1972 .

[16]  The Preparation of Thin Films of B-1 Structure Superconducting Ternary Compounds , 1973 .

[17]  A. Brailsford,et al.  Anelastic Relaxation in Crystalline Solids , 1973 .

[18]  V. E. Bottom.  Introduction to Quartz Crystal Unit Design , 1982 .

[19]  J. J. Blech.  On Isothermal Squeeze Films , 1983 .

[20]  J. B. Starr.  Squeeze-film damping in solid-state accelerometers , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[21]  M. Mehregany,et al.  Microelectromechanical systems , 1993, IEEE Circuits and Devices Magazine.

[22]  V. Kinra,et al.  Thermoelastic Damping of a Laminated Beam in Flexure and Extension , 1993 .

[23]  Bioremediability and biological value of microbial mats , 1994 .

[24]  ジョバノヴィック，ミサ・ブイ,et al.  Solid-state sensor , 1995 .

[25]  T. Veijola,et al.  Equivalent-circuit model of the squeezed gas film in a silicon accelerometer , 1995 .

[26]  N. C. MacDonald,et al.  Dissipation measurements of vacuum-operated single-crystal silicon microresonators , 1995 .

[27]  H. Hosaka,et al.  DAMPING CHARACTERISTICS OF BEAM-SHAPED MICRO-OSCILLATORS , 1995 .

[28]  Wilko J. Kindt,et al.  Quality factor of torsional resonators in the low-pressure region , 1996 .

[29]  Cam Nguyen,et al.  Frequency trimming and Q-factor enhancement of micromechanical resonators via localized filament annealing , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[30]  Changchun Zhu,et al.  The theoretical analysis on damping characteristics of resonant microbeam in vacuum , 1999 .

[31]  L. Sekaric,et al.  Measurement of mechanical resonance and losses in nanometer scale silicon wires , 1999 .

[32]  M. Roukes,et al.  Thermoelastic damping in micro- and nanomechanical systems , 1999, cond-mat/9909271.

[33]  Masayoshi Esashi,et al.  Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers , 2000 .

[34]  Qi Li,et al.  Thermodynamics of the Mg–B system: Implications for the deposition of MgB2 thin films , 2001 .

[35]  A. Mueller,et al.  MoS2,MoSe2及びα‐MoTe2のバンド構造 角度分解光電子分光研究とab initio計算 , 2001 .

[36]  Andrew G. Glen,et al.  APPL , 2001 .

[37]  J. Gilman,et al.  Nanotechnology , 2001 .

[38]  M. Cross,et al.  Elastic Wave Transmission at an Abrupt Junction in a Thin Plate, with Application to Heat Transport and Vibrations in Mesoscopic Systems , 2000, cond-mat/0011501.

[39]  D. Photiadis,et al.  Thermoelastic loss in microscale oscillators , 2002 .

[40]  Michael L. Roukes,et al.  Intrinsic dissipation in high-frequency micromechanical resonators , 2002 .

[41]  Yang Y-J,et al.  Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries , 2002 .

[42]  F. Ayazi,et al.  An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations , 2003 .

[43]  Yuancheng Sun,et al.  Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures , 2003 .

[44]  Masayoshi Esashi,et al.  Thermal treatments and gas adsorption influences on nanomechanics of ultra-thin silicon resonators for ultimate sensing , 2004 .

[45]  Methyl monolayers suppress mechanical energy dissipation in micromechanical silicon resonators , 2004 .

[46]  J. A. Henry,et al.  Controlling energy dissipation and stability of micromechanical silicon resonators with self-assembled monolayers , 2004 .

[47]  Kyungsuk Yum,et al.  Experimental measurement and model analysis of damping effect in nanoscale mechanical beam resonators in air , 2004 .

[48]  Wenjing Ye,et al.  On the squeeze-film damping of micro-resonators in the free-molecule regime , 2004 .

[49]  웨버 마크더블유.,et al.  Mems gyroscope with horizontally oriented drive electrodes , 2005 .

[50]  Srikar Vengallatore,et al.  Analysis of thermoelastic damping in laminated composite micromechanical beam resonators , 2005 .

[51]  R. Aigner,et al.  Optimization of acoustic mirrors for solidly mounted BAW resonators , 2005, IEEE Ultrasonics Symposium, 2005..

[52]  John L. Crassidis,et al.  Sensors and actuators , 2005, Conference on Electron Devices, 2005 Spanish.

[53]  Brian H. Houston,et al.  A loss mechanism study of a very high Q silicon micromechanical oscillator , 2005 .

[54]  Stewart McWilliam,et al.  Thermoelastic damping of the in-plane vibration of thin silicon rings , 2006 .

[55]  Narayana R Aluru,et al.  Theory of thermoelastic damping in electrostatically actuated microstructures , 2006 .

[56]  M. Palaniapan,et al.  6Mhz Bulk-Mode Resonator with Q Values Exceeding One Million , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[57]  Robert Puers,et al.  Journal of Micromechanics and Microengineering: Editorial , 2007 .

[58]  J.T.M. van Beek,et al.  Parameter Extraction and Support-Loss in MEMS Resonators , 2013, 1304.7953.

[59]  Anchor Loss Reduction in Resonant MEMS using MESA Structures , 2007, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[60]  D. Weinstein,et al.  Internal Dielectric Transduction of a 4.5 GHz Silicon Bar Resonator , 2007, 2007 IEEE International Electron Devices Meeting.

[61]  T. Kenny,et al.  Non-isothermal micromechanical resonators , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[62]  Farrokh Ayazi,et al.  Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators , 2007 .

[63]  Yu Wang,et al.  Understanding the effects of surface chemistry on Q: mechanical energy dissipation in alkyl-terminated (C1-C18) micromechanical silicon resonators. , 2007, The journal of physical chemistry. B.

[64]  Numerical and compact modelling of squeeze-film damping in RF MEMS resonators , 2008, 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS.

[65]  I. Wilson-Rae,et al.  Intrinsic dissipation in nanomechanical resonators due to phonon tunneling , 2007, 0710.0200.

[66]  Joachim Oberhammer,et al.  IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, January 25-29, 2009 , 2009 .

[67]  Thomas W. Kenny,et al.  Multimode thermoelastic dissipation , 2009 .

[68]  Steven M. Durbin,et al.  Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures: Preface , 2009 .

[69]  Matthew P. Cartmell,et al.  Journal of Sound and Vibration: Editorial , 2011 .

[70]  Nico Karssemeijer,et al.  Ultrasonics, Ferroelectrics, and Frequency Control , 2011 .

[71]  Matthew J. Rosseinsky,et al.  Physical Review B , 2011 .