Silica waveguides on silicon and their application to integrated-optic components

A marriage of optical fibre fabrication technology and LSI microfabrication technology gave birth to fibre-matched silica waveguides on silicon: thick glass layers of high-silica-content glass are deposited on silicon by flame hydrolysis, a method originally developed for fibre preform fabrication. Silica channel waveguides are then formed by photolithographic pattern definition processes followed by reactive ion etching. This ‘high silica (HiS) technology’ offers the possibility of integrating a number of passive functions on a single silicon chip, as well as the possibility of the hybrid integration of both active and passive devices on silicon. This paper reviews the NTT HiS technology and its application to integrated-optic components such as optical beam splitters, optical switches, wavelength-division multi/demultiplexers and optical frequency-division multi/demultiplexers. The clear and simple waveguide structures produced by the HiS technology make it possible to design and fabricate these components with high precision and excellent reproducibility.

[1]  E. A. J. Marcatili,et al.  Dielectric rectangular waveguide and directional coupler for integrated optics , 1969 .

[2]  Stewart E. Miller,et al.  Integrated optics: An introduction , 1969 .

[3]  Yasuji Murakami,et al.  Deposited silica waveguide for intergrated optical circuits , 1981 .

[4]  Morio Kobayashi,et al.  Flame hydrolysis deposition of SiO2-TiO2 glass planar optical waveguides on silicon , 1983 .

[5]  Mitsuho Yasu,et al.  Fabrication of SiO2-TiO2 glass planar optical waveguides by flame hydrolysis deposition , 1983 .

[6]  Fabrication of a high silica glass waveguide optical accessor , 1984 .

[7]  Low crosstalk polarisation-maintaining optical fibre with an 11 km length , 1984 .

[8]  Hybrid integration of a laser diode and high-silica multimode optical channel waveguide on silicon , 1985 .

[9]  A Kumar,et al.  Prediction of coupling length in a rectangular-core directional coupler: an accurate analysis. , 1985, Optics letters.

[10]  Morio Kobayashi,et al.  High-silica single-mode optical reflection bending and intersecting waveguides , 1985 .

[11]  Guided-wave optical wavelength-division multi/demultiplexer using high-silica channel waveguides , 1985 .

[12]  High-silica multimode channel waveguide structure for minimizing fiber-waveguide-fiber coupling loss , 1986 .

[13]  Mitsuho Yasu,et al.  Low-loss high-silica single-mode channel waveguides , 1986 .

[14]  Y. Yamada,et al.  Single-mode optical fiber connection to high-silica waveguide with fiber guiding-groove , 1987 .

[15]  Morio Kobayashi,et al.  Guided-wave optical chip-to-chip interconnections , 1987 .

[16]  S. Valette,et al.  State of the art of integrated optics technology at LETI for achieving passive optical components , 1988 .

[17]  Norio Kashima,et al.  Very small single-mode ten-fiber connector , 1988 .

[18]  N. Olsson,et al.  Integrated four-channel Mach-Zehnder multi/demultiplexer fabricated with phosphorous doped SiO/sub 2/ waveguides on Si , 1988 .

[19]  H. Toba,et al.  A four-channel optical waveguide multi/demultiplexer for 5-GHz spaced optical FDM transmission , 1988 .

[20]  H. Toba,et al.  A wide-band guided-wave periodic multi/demultiplexer with a ring resonator for optical FDM transmission systems , 1988 .

[21]  H. Toba,et al.  Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers , 1988 .

[22]  T. Kitagawa,et al.  Neodymium-doped silica optical waveguide laser on silicon substrate , 1989, IEEE Photonics Technology Letters.

[23]  Koichi Asatani.  Lightwave subscriber loop systems toward broad-band ISDN , 1989 .

[24]  N. Nourshargh,et al.  Integrated optic 1*4 splitter in SiO/sub 2//GeO/sub 2/ , 1989 .

[25]  C. Henry,et al.  Glass waveguides on silicon for hybrid optical packaging , 1989 .

[26]  Daniel A. Nolan,et al.  Passive components in the subscriber loop , 1989 .

[27]  Waveguide-type optical passive ring-resonator gyro using time-division detection scheme , 1989 .

[28]  G. Végh,et al.  A graphical method for determining the parameters of a diffusion profile in silicon by infrared reflection spectroscopy , 1989 .

[29]  R. Kashyap,et al.  Second harmonic generation in GeO/sub 2/ ridge waveguide , 1989 .

[30]  H. Toba,et al.  16-channel optical FDM distribution/transmission experiment utilising multichannel frequency stabiliser and waveguide frequency selection switch , 1989 .