Sensitive detection of oxygen using a diffused integrating cavity as a gas absorption cell

Abstract In this study, an oxygen monitoring system was demonstrated for sensitive oxygen detection. The system is based on tunable diode laser absorption spectroscopy (TDLAS) and wavelength modulation spectroscopy (WMS). Stable 2nd-harmonic signals of oxygen were detected by measuring the oxygen P9 absorption line at 764.38 nm. In the detection, a cubic diffuse integrating cavity was employed as a gas absorption cell to increase the optical path length and achieve a higher sensitivity. In addition, to perform automatic gas concentration measurements, a data recording and analyzing program based on the National Instruments LabVIEW software platform was developed. An uncertainty of 0.05% and a detection sensitivity of 350 ppmv were obtained using this system.

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