论文信息 - Impact of Short-Wavelength and Long-Wavelength Line-Edge Roughness on the Variability of Ultrascaled FinFETs - 字舞流文

Impact of Short-Wavelength and Long-Wavelength Line-Edge Roughness on the Variability of Ultrascaled FinFETs

T. Hook | M. Vaidyanathan | K. Holland | D. Kienle | P. Gudem | Michael Wong | Z. Yuan | Sam Anderson | S. Rizwan