Ultralow-Power Chip-Based Soliton Microcombs for Photonic Integration

Using the photonic Damascene reflow process, we present single soliton formation in 99-GHz-FSR Si<inf>3</inf>N<inf>4</inf> microresonators of Q-factor exceeding 15 × 10<sup>6</sup>, with less than 10 mW optical power.

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