论文信息 - Use of wafer temperature determination for the study of unintentional parameter influences for the MOVPE of III‐nitrides - 字舞流文

Use of wafer temperature determination for the study of unintentional parameter influences for the MOVPE of III‐nitrides

Y. S. Cho | Zdenek Sofer | M. Zorn | H. Hardtdegen | J. Zettler | K. Haberland | N. Kaluza | R. Steins